Fabrication of arbitrarily shaped silicon and silicon oxide nanostructures using tip- based nanofabrication
نویسندگان
چکیده
منابع مشابه
Nanofluidic channels of arbitrary shapes fabricated by tip-based nanofabrication.
Nanofluidic channels have promising applications in biomolecule manipulation and sensing. While several different methods of fabrication have been demonstrated for nanofluidic channels, a rapid, low-cost fabrication method that can fabricate arbitrary shapes of nanofluidic channels is still in demand. Here, we report a tip-based nanofabrication (TBN) method for fabricating nanofluidic channels ...
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تاریخ انتشار 2014